• Vacuum compatible up to 10-6hPa (0.7 10-7 Torr)
• Proprietary 4-contact point and 2 pc ball bearing designfor stiffness and low runout
• Backlash-free drive for excellent repeatability andreliability
• Stepper motors for fine MIM and minimal heating
The URS-BPPV6 rotation stages features an enhanced, lower profile package providingeasier top down mounting that is directly compatible with our vacuum compatible stages.
When using with our XPS or ESP301 motion controllers with high micro-step capability,low noise operation and very small incremental motions are guaranteed. The URS-BPPV6rotation stage does not use encoder feedback, but calculates position by the number ofcommanded steps and micro-steps. For this purpose, the stepper motor is directly attachedto the worm screw with a proprietary bellow coupling with high torsional stiffness and nogear or belt drive in between. Furthermore, the high output torque of the stepper motorminimizes the risk of lost steps and provides optimum motion sensitivity with goodlinearity between commanded micro-step and the actual motion of the stage.
The URS-BPPV6 rotation stages features a proprietary 4-contact point ball bearing. Theunique, 2-piece design of the URS-BPPV6 provides a low-profile compact stage withexceptional stiffness, high reliability and outstanding wobble and eccentricity. The tiltedworm screw arrangement allows for 4 symmetric mounting holes as compared to otherdesigns that only feature 2 or 3 mounting holes. As a result, the URS-BPPV6 stagesprovides a higher stiffness for better support of higher or off-centered loads.
Specifications
|
URS50BPPV6
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URS75BPPV6
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Travel Range (°)
|
360 continuous
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360 continuous
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Resolution (°)
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0.0014
|
0.0002
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Minimum Incremental Motion (°)
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0.0015(0.0005 in open loop mode)
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0.0002
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Uni-directional Repeatability, guaranteed (°)
|
0.004or ±0.002
|
0.004 or ±0.002
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Bi-directional Repeatability, guaranteed (°)
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0.006or ±0.003
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0.014or ±0.007
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Absolute Accuracy (°)
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0.04or ±0.02
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0.03or ±0.01
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Max. Speed (°/s)
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4
|
20
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Wobble, guaranteed (μrad)
|
50 or ±25
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50 or ±25
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Eccentricity, guaranteed (μm)
|
6 or ±3
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3 or ±1.5
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