The piezoelectric stage XYZ200M has a stroke of 200 μm along the X, Y and Z axis and is able
to bear a high load up to 3 kg. Applications include Confocal microscopy, mask positioning and inspection. This stage is based on APA200M and shows a high stiffness. The stage can be equipped with Strain Gauges or Eddy Current sensors (ECS option) for a very fine accuracy up to 10nm. Parasitic rotations (along X, Y and Z rotation) are very limited. The moving frame can be custom designed (attachment points, holes...). This mechanism requires the Push-pull option on the first two channels of the driver.
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References
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Unit
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XYZ200M
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Item Code
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V-XYZM200
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Notes
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-
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Sensors option
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SG,ECS
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Active axis
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TX,TY,TZ
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Max. No-load displacement[Tx,Ty]
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um
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180
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Max. Z displacement
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um
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200
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Max. parasitic Z rotations
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urad
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240
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Max. parasitic XY rotations
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urad
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50
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Voltage range
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V
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-20…150
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Stiffness
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N/um
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0.66
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Height(Z axis)
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mm
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44.0
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Dimensions(X&Y axis)
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mm
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100*100
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Resolution
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nm
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1.8
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Mass
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g
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540
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Unload resonance frequency(in the actuation’s direction)
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Hz
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380
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Response time
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ms
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1.32
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Capacitance (per electrical port)
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uF
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6.30
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Medical interfaces(payload)
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Objective interface max 4/55 *1.36(to be specified)
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Medical interfaces(frame)
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4 Ф4.5mm holes on []84
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Electrical interfaces
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3 RG178B/U coaxial cables
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