The piezoelectric stage XY200M has a stroke of 200 μm along the X and Y axis and is able to bear a high load up to 3 kg. Applications include Atomic Force or Scanning Tunneling Microscopes and mask positioning. This stage is based on APA200M and shows a high stiffness. The stage can be equipped with Strain Gauges or Eddy Current Sensors (ECS option) for a very fine accuracy up to 10nm. Parasitic rotations (along X, Y and Z rotation) are very limited. The moving frame can be custom designed (attachment points, holes...). The compact XY25XS stage is well suited to integrated devices for fiber positioning, micro scanning...
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References
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Unit
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XY25XS
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XY200M
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Item Code
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V-XYXS25
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V-XYM200
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Notes
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-
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-
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Sensors option
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SG
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SG,ECS
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Active axis
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TX,TY
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TX,TY
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Max. No-load displacement[Tx,Ty]
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um
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25
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200
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Max. out of plane Z displacement
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um
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0.50
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1.00
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Max. parasitic Z rotations
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urad
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50
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240
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Max. parasitic XY rotations
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urad
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10
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50
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Voltage range
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V
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-20…150
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-20…150
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Stiffness
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N/um
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2.50
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0.59
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Height(Z axis)
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mm
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18.0
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22.0
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Dimensions(X&Y axis)
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mm
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50*50
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100*100
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Resolution
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nm
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0.3
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2.0
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Mass
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g
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80
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180
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Unload resonance frequency(in the actuation’s direction)
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Hz
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3000
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580
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Response time
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ms
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0.17
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0.86
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Capacitance (per electrical port)
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uF
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0.50
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6.30
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Mechanical interfaces(payload)
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1Ф17mm hole+4Ф1.8mm onФ20mm
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3Ф2.7mm holes on
Ⅱ38
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Mechanical interfaces(frame)
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4 Ф2.8mm holes on []45
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4 Ф4.5mm holes on []84
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Electrical interfaces
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2 RG178B/U coaxial cables
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2 RG178B/U coaxial cables
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