AI-HH-30D-200XY-62Z-80R-CM

Stage

Hybrid Hexapod (Angulares® )

Travel - XY

200 mm (+/- 100 mm)

Travel - Z

62 mm (+ 62 mm/- 0 mm)

Travel - Pitch & Roll

+/- 30 deg

Travel - Yaw

360 deg continuous

Dimensions (Length x Width x Height)

510 mm x 336.5 mm x 293.2 mm

Drives

XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor

Feedback

Linear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder

Bearings

Crossed Roller Bearings

Rotary Brake

Standard: No Brake
Optional: Pneumatic Release, Spring Engage Brake (B)

Cables

High Flex, 10M Cycle, 3m Length

Structure

Anodized Aluminum 6061-T6

Environment

Ambient

Operating Temperature

0°C to 50°C

Humidity

10% to 80% Non-Condensing

Performance Specifications [1]

(STD)

ULTRA

NANO

Bidirectional Repeatability

XY

+/- 30 nm

Z

+/- 200 nm

Pitch And Roll

+/- 1 arc-sec

Yaw

+/- 0.5 arc-sec

Backlash

XY

0 nm / arc-sec
(no backlash on any axis)

Z

Pitch And Roll

Yaw

Minimum Incremental Step Size

XY

< 20 nm

Z

< 20 nm

Pitch And Roll

< 0.1 arc-sec

Yaw

< 0.1 arc-sec

Yaw Runout

Axial Runout

12 µm

10 µm

5 µm

Radial Runout

12 µm

10 µm

5 µm

Wobble

20 arc-sec

15 arc-sec

10 arc-sec

Resolution

XY

Standard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)

Z

Pitch And Roll

Yaw

0.04 arc-sec

Max Linear Velocity [3]

XY

50  mm/s

Z

15  mm/s

Max Linear Acceleration [3]

XY

0.1 G

Z

0.3 G

Max Angular Velocity [3]

Pitch And Roll

20 deg/s

Roll

>3000 deg/s

Max Angular Acceleration [3]

Pitch And Roll

>1000 deg/s²

Yaw

>2000 deg/s²

Max Payload

5 kg

Assembly Mass

14kg