AI-CM-6000

Stage

Linear Stage

Travel

60 mm (+/- 30 mm)

Dimensions (Length x Width x Height)

130 mm x 120 mm x 32 mm

Motor

Direct Drive (Ironless Core Linear Motor)

Feedback

Non-Contact Optical Linear Encoder

Bearings

Crossed Roller Bearings

Cables

High Flex, 10M Cycle, 3m Length

Structure

Anodized Aluminum 6061-T6

Environment

Ambient

Optional: Clean Room and Vacuum (10-6 Torr)

Operating Temperature

0°C to 50°C

Humidity

10% to 80% Non-Condensing

Performance Specifications [1]

(STD)

ULTRA

NANO

Linear Displacement Accuracy

+/- 3.0 µm

Bidirectional Linear Repeatability

+/- 30 nm

Resolution

Standard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)

Straightness

+/- 2.5 µm

+/- 1.5 µm

+/- 1.0 µm

Flatness [2]

+/- 2.5 µm

+/- 1.5 µm

Pitch [2]

+/- 12.0 arc-sec

Yaw

+/- 12.0 arc-sec

Roll

+/- 12.0 arc-sec

Max Velocity [3]

0.9 m/s

Max Acceleration [3]

3.0 G

Max Payload
Capability

10 kg

Assembly Mass

1.4 kg