AI-BSD-5000-Z

Stage

Vertical Z Stage

Travel

50 mm (+/- 25 mm)

Dimensions (Length x Width x Height)

175 mm x 100 mm 229 mm

Motor

Frameless Torque Motor, Precision Ball Screw

Feedback

Non-Contact Optical Linear Encoder

Bearings

Crossed Roller Bearings

Brake

Standard: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: No Brake

Counterbalance

Standard: None Needed
Optional: Pneumatic Counterbalance to Increase Payload Capability

Cables

High Flex, 10M Cycle, 3m Length

Structure

Anodized Aluminum 6061-T6

Environment

Ambient
Optional: Clean Room

Operating Temperature

0°C to 50°C

Humidity

10% to 80% Non-Condensing

Performance Specifications [1]

(STD)

ULTRA

NANO

Linear Displacement Accuracy

+/- 5 µm

+/- 1.0 µm

+/- 0.5 µm

Bidirectional Linear Repeatability

+/- 125 nm

+/- 100 nm

Resolution

Standard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)

Straightness

+/- 4 µm

+/- 1.0 µm

+/- 0.5 µm

Flatness [2]

+/- 4.0 µm

+/- 2.0 µm

Pitch

+/- 15 arc-sec

Yaw

+/- 15 arc-sec

Roll

+/- 15 arc-sec

Max Velocity [3]

0.1 m/s

Max Acceleration [3]

1.0 G

Max Payload Capability

20 kg

Max Payload Capability (With Pneuboost)

50 kg

Assembly Mass

7.6 kg