AI-6D-250XY-92Z

Stage

Hybrid Hexapod  (6 DOF)

Travel - XY

250mm (+/- 125mm)

Travel - Z

92mm (+ 92mm/ - 0mm) 

Travel - Pitch & Roll

+/- 20 deg

Travel - Yaw

360 deg continuous

Dimensions (Length x Width x Height)

435 mm x 435 mm x 707.5 mm

Drives

XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor

Bearings

Crossed Roller Bearings

Counterbalance

Pneumatic Cylinder
Optional: Magnetic Spring (Constant Force)

Cables

High Flex, 10M Cycle, 3m Length

Structure

Anodized Aluminum 6061-T6

Environment

Ambient

Operating Temperature

0°C to 50°C

Humidity

10% to 80% Non-Condensing

Performance Specifications

Linear Resolution

Standard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)

Pitch And Roll Resolution

~0.02 arc-sec

Yaw Resolution

~0.01 arc-sec

Max Linear Velocity [10]

0.3 m/s

Max Angular Velocity (Pitch & Roll) [10]

90 deg/s

Max Angular Velocity (Yaw) [10]

180 deg/s

Assembly Mass

130 kg

Max Payload [11]

35 kg