The Hybrid Hexapod® was developed by ALIO Industries to address the inherent performance limitations of conventional hexapods. ALIO’s 6-Degree-Of-Freedom (6-DOF) design seamlessly blends and takes advantage of the strengths of serial and parallel kinematic struc-tures while avoiding their weaknesses. The Hybrid Hexapod offers far greater functional ver-satility, nanometer-level accuracy, repeatability, and superior 6-DOF trajectories than is pos-sible with any traditional hexapod or stacked stage configuration. The unique design is com-prised of a parallel kinematic tripod to deliver Z plane and tip/tilt motion. This tripod is inte-grated with a monolithic serial kinematic stage for XY planar motion. A rotary stage integrat-ed into the top of the tripod (or beneath depending on application needs) provides 360-degree continuous yaw (Theta-Z) rotation. In this hybrid design, individual axes can be cus-tomized to provide XY travel ranges from millimeters to virtually unlimited ranges while maintaining nanometer-levels of precision. Novel forward and inverse controller kinematics provide an unlimited number of programmable Tool Center Point locations. The HH-30D’s ±30 degree tip/tilt travel is by far the most angular travel range available from any 6-DOF positioner on the market and offers the same unmatched positioning performance found in any of ALIO’s full-line of Hybrid Hexapod systems.

Features

Precision Crossed Roller Bearing Guides

Direct-Read Incremental or Absolute Encoder Feedback on All Axes

Linear Motor and/or Ball Screw Drives

Unlimited Programmable Tool Center Point Locations and Coordinate Offsets

Zero Backlash on All Axes

Key Performance

XY Travel 60 & 100mm, Up To 450mm Standard (Capable of Unlimited XY Travel)

Z Travel 62mm (Up To 208mm with Other Tripod Models)

Tip/Tilt Travel ±30 Deg, Continuous 360 Deg Theta-Z

XYZ Bidirectional Repeatability Less Than ±100nm

Angular Bidirectional Repeatability Less Than ±0.6 arc-sec

Velocity Up To 100mm/sec XY and 20mm/sec Z (> in Linear Motor Versions)

Less Than 20nm Linear and 0.1 arc-sec Angular Minimum Incremental Motion

Applications

Aspheric and Freeform Optical Metrology

Silicon Photonics Packaging and Probing

Laser Micro Processing (non-planar sub-strates and taper control)

Wafer Metrology

Camera Module Alignment and Assembly

Sensor/Image Stabilization Testing

Optical Element and Fiber Alignment