Feature：
| Travel (X, Y, Z) |
±27.5 mm, ±25 mm, ±14mm |
| Travel (Θx, Θy, Θz) |
±11.5°, ±10.5°, ±19° |
| Minimum Incremental Motion (X, Y, Z) |
0.1 µm, 0.1 µm, 0.05 µm |
| Minimum Incremental Motion (Θx, Θy, Θz) |
0.00005° (0.8 µrad), 0.00005°, 0.0001° |
| Repeatability (X, Y, Z) |
0.2 µm, 0.2 µm, 0.1 µm |
| Repeatability (θx, θy, θz) |
0.0001°, 0.0001°, 0.0002° |
| Maximum Speed (X, Y, Z) |
12 mm/s, 10 mm/s, 5 mm/s |
| Maximum Speed (Θx, Θy, Θz) |
8 °/s, 8 °/s, 16°/s |
| Centered Load Capacity (horizontal base) |
6 kg |
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